Logic Detailed Structural Analysis of the Apple/Authentec iPhone 5S TMDR92 Touch ID Capacitive Sensor

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Finger Print Sensor
Apple’s iPhone 5S Touch ID sensor is a fingerprint recognition feature designed by Apple for its iPhone 5S, iPhone 6 and iPhone 6 Plus smartphones. A 88 x 88 pixel (~500 pixel/inch) capacitive touch sensor (TMDR92) uses capacitive coupling to detect the users fingerprint with the coded information being stored locally A7 or A8 SoCs. The TMDR92 is fabricated using a six-metal (Al) CMOS process. The device features 150 nm minimum gate length transistors and a 0.54 µm metal 1 pitch, suggesting a 180 nm process. MiM capacitors are formed between metal 5 and metal 6, and the device employs non-silicided polysilicon resistors. The touch-sensitive capacitor plates are implemented in metal 6. The reported results are derived from scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (TEM-EDS), electron energy loss spectroscopy (EELS) and spreading resistance profiling (SRP).
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