Intel Ice Lake 10 nm FinFET Process aCMOS Essentials

Product Code

ACE-1908-802

Release Date

31/12/2019

Availability

Published

Product Item Code

INT-SRG0N

Device Manufacturer

Intel

Device Type

Microprocessor

Subscription

Compute

Channel

Logic - Process (IP)

Logic - Process

Intel Ice Lake 10 nm FinFET Process aCMOS Essentials

The Advanced CMOS Essentials (ACE) deliverable for logic microprocessor chips with FinFETs comprises a concise analyst’s summary document highlighting observed critical dimensions and salient features supported by the following image folders:

Downstream product teardown
Package X-rays, top metal and poly die photographs, non-invasive optical photos of die features
Transmission (TEM) and (SEM) bevel through the logic region and SRAM
TEM and SEM cross section of the general device structure, back end of line (BEOL) (metals, dielectrics) and front end of line (FEOL) structures

The results of TEM-EDS and EELS analyses are included in the ACE summary document. The ACE deliverable provides timely competitive benchmarking information and enables cost-effective tracking of technical innovation across a breadth of competitors.

Two TEM cross sections, orthogonal to the transistor gate fingers and fins showing the lower metals and dielectrics, transistor gates (NMOS and PMOS), fins, isolation, and other FEOL features.

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