Product Code
PPR-1607-801
Availability
Published
Product Item Code
MAX-MAX77838
Device Manufacturer
Maxim
Device Type
Power Management IC
Subscription
Power Semiconductor
Channel
Power Semiconductor - Power Essentials
Maxim MAX77838 PMIC 90 nm BCD Process Review - Process Review Report
This report presents a Process Review of the Maxim PB38C-0 die. This report contains the following detailed information:
Selected teardown photographs, package photographs, package X-rays, die markings, and die photographs
Scanning electron microscopy (SEM) cross-sectional micrographs of the general structure of the die dielectric materials, major features, and transistors
Measurements of vertical and horizontal dimensions of major microstructural features
Plan-view optical micrograph of the die delayered to polysilicon
Transmission electron microscopy (TEM) cross-sectional micrographs of the logic MOS and LDMOS transistors, selected metal/dielectric stack features, and interlevel MIM capacitors
Scanning microwave impedance microscopy (sMIM) images of wells
Secondary ion mass spectrometry (SIMS) doping profile analysis of wells and silicon substrate
Spreading Resistance Profiling (SRP) of the silicon substrate
Planar SEM images of selected circuit elements at polysilicon
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