This is a process analysis report deliverable for bulk acoustic wave (BAW) filters (AFB). The complete AFB deliverable is supported by the following unannotated image folders:

• Teardown and device removal of parts when parts are obtained from a downstream device
• Package and die photographs
• SEM cross-section of the filter die to capture the following:
  • Images of the overall structure
  • Images and measurements of the piezoelectric layers
  • Images and measurements of the interdigitated transducer (IDT) layers
• SEM-EDS of all features listed above>

The image set for the report is derived from a single cross-sectioned die sample. Value added information, such as additional planes of cross-sectioning, may be included on a case-by-case basis.