The Power Essentials (PEF) deliverable includes a one-page summary of observed device metrics and salient features. The summary is supported by the following unannotated image folders:

• Package X-rays, die photographs, non-invasive optical photographs of the die features
• Scanning electron microscopy (SEM) plan-view images of the device delayered to the gate level
• Exploratory cross-sectional SEM images of the device structure
• Detailed cross-sectional transmission electron microscope (TEM) images of the device structure
• The image set for a standard PEF project is derived from a delayered sample for SEM planar analysis, a single plane of cross-sectioning for SEM structural analysis and a single TEM sample for the detailed structural analysis. Value add information, such as additional planes of cross-sectioning, may be included on a case-by-case basis.
  

The Power Essentials deliverable provides basic competitive benchmarking information and enables cost-effective tracking of multiple competitors’ technology.